One of the five MPW launches, this first phase focuses on sensor applications.

Companies, universities and research institutes can include their projects as matrices on joints to test their ideas for larger-scale devices at relatively low cost..

2D-EPL is a € 20 million project aimed at pioneering the production of prototype electronics and sensors based on graphene and related materials, and integrating them into established silicon semiconductor platforms.

In addition, the project will refine and expand the production process of graphene-based electronics, including the development of critical tools, materials and processes.

2D-EPL includes Chalmers University of Technology, Sweden; Aixtron, Germany and the United Kingdom; Interuniversity Center for Microelectronics (imec), Belgium; AMO, Germany; VTT, Finland; Süss MicroTec, Germany; Graphenea, Spain; Micro Resist Technology, Germany; Innovations in High Performance Microelectronics (IHP), Germany and Oxford Instruments.

The 2D-EPL project will offer several types of integration services, including MPW runs.

The first run will take place in the 400th of AMO GmbH2 most modern clean room. Targeted applications are applications for bio, gas or chemical sensors, Hall sensors or photodetectors, taking advantage of the exceptional sensitivity of graphene to the environment.

The main process is a graphene field effect transistor (GFET) with several customization options.

The MPW run offers participants a unique chance to acquire a GFET of matrices manufactured to their own design.

The cost of production is shared between the 2D-EPL project and the client, which means that companies, universities and research institutes can access this technology at a much lower cost.

Currently available quantities are suitable for prototyping, research and development.

“This waffle release is a chance for academic groups, start-ups and other companies to test new ideas for devices with 2D materials on a larger scale at relatively low cost,” says Gordon Rinke of AMO, “as a result they can collect more data on their devices and directly test a larger production volume – a necessary step to bring a product to market. “

“MPW’s programs are an important step in the 2D-EPL project,” says Cedric Huygebert of 2D-EPL. possibility with regard to the production of these devices. We plan to test and analyze each stage of the production process to increase and improve the production of graphene-integrated electronics.

The plate matrices for several projects can be customized within a set of specifications – the size and some critical dimensions are fixed, for example – and must be designed in accordance with the process design kit (PDK).

AMO will support and collaborate with successful candidates in matrix design and offer a library of device designs to use as a basis for modification.

The first 2D-EPL MPW cycle is open for applications on 1 February 2022 and the call ends on 30 June 2022. The production phase of the MPW cycle will take place between 1 September and 31 October 2022.

To apply to be part of the first MPD implementation of 2D-EPL, visit: Or follow these links for more information on 2D-EPL project of Graphene flagship or AMO.

Graphene-based MPW run

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